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鐮峰寲閹靛お闄借兘闆绘睜

GaAs灞簬III-V鏃忓寲鍚堢墿鍗婂皫(d菐o)楂旀潗鏂�锛屽叾鑳介殭鐐�1.4eV锛屾濂界偤楂樺惛鏀剁巼澶櫧鍏夌殑鍊�锛岃垏澶櫧鍏夎瓬鐨勫尮閰嶈純閬╁悎锛屼笖鑳借€愰珮婧�锛屽湪250鈩冪殑姊濅欢涓�锛屽厜闆昏綁(zhu菐n)鎻涙€ц兘浠嶅緢鑹ソ锛屽叾鏈€楂樺厜闆昏綁(zhu菐n)鎻涙晥鐜囩磩30%锛岀壒鍒ラ仼鍚堝仛楂樻韩鑱氬厜澶櫧闆绘睜銆�

鐮峰寲閹电敓鐢�(ch菐n)鏂瑰紡鍜屽偝绲�(t菕ng)鐨勭鏅跺湏鐢熺敘(ch菐n)鏂瑰紡澶т笉鐩稿悓锛岀牱鍖栭幍闇€瑕侀噰鐢ㄧ鏅舵妧琛�(sh霉)鍒堕€�锛岄€欑ó纾婃櫠鍦撶殑鐩村緫閫氬父鐐�4鈥�6鑻卞锛屾瘮纭呮櫠鍦撶殑12鑻卞瑕佸皬寰楀銆傜鏅跺湏闇€瑕佺壒娈婄殑姗�(j墨)鑷�(t谩i)锛屽悓鏅�(sh铆)鐮峰寲閹靛師鏉愭枡鎴愭湰楂樺嚭纭呭緢澶氾紝鏈€绲傚皫(d菐o)鑷寸牱鍖栭幍鎴愬搧IC鎴愭湰姣旇純楂�銆傜鏅剁洰鍓嶆湁鍏╃ó锛屼竴绋槸鍖栧(xu茅)鐨凪OCVD锛屼竴绋槸鐗╃悊鐨凪BE銆侴aAs绛塈II-V鍖栧悎鐗╄杽鑶滈浕姹犵殑鍒跺倷涓昏閲囩敤MOVPE鍜孡PE鎶€琛�(sh霉)锛屽叾涓璏OVPE鏂规硶鍒跺倷GaAs钖勮啘闆绘睜鍙楄ク搴曚綅閷�(cu貌)锛屽弽鎳�(y墨ng)澹撳姏锛孖II-V姣旂巼锛岀附娴侀噺绛夎澶氬弮鏁�(sh霉)鐨勫奖闊�銆� GaAs锛堢牱鍖栭幍锛夊厜闆绘睜澶у閲囩敤娑茬浉澶栧欢娉曟垨MOCVD鎶€琛�(sh霉)鍒跺倷銆傜敤GaAs浣滆ク搴曠殑鍏夐浕姹犳晥鐜囬珮閬�(d谩)29.5%锛堜竴鑸湪19.5%宸﹀彸锛� 锛岀敘(ch菐n)鍝佽€愰珮婧拰杓诲皠锛屼絾鐢熺敘(ch菐n)鎴愭湰楂�锛岀敘(ch菐n)閲忓彈闄�锛岀洰鍓嶄富瑕佷綔绌洪枔闆绘簮鐢�銆備互纭呯墖浣滆ク搴�锛� MOCVD鎶€琛�(sh霉)鐣拌唱(zh矛)澶栧欢鏂规硶鍒堕€燝aAs闆绘睜鏄檷鐢ㄤ綆鎴愭湰寰堟湁甯屾湜鐨勬柟娉�銆傚凡鐮旂┒鐨勭牱鍖栭幍绯诲垪澶櫧闆绘睜鏈夊柈鏅剁牱鍖栭幍锛屽鏅剁牱鍖栭幍锛岄幍閶佺牱--鐮峰寲閹电暟璩�(zh矛)绲�(ji茅)锛岄噾灞�-鍗婂皫(d菐o)楂旂牱鍖栭幍锛岄噾灞�--绲曠罚楂�--鍗婂皫(d菐o)楂旂牱鍖栭幍澶櫧闆绘睜绛夈€�

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鐮峰寲閹碉紙GaAs锛塈II-V鍖栧悎鐗╅浕姹犵殑杞�(zhu菐n)鎻涙晥鐜囧彲閬�(d谩)28%锛孏aAs鍖栧悎鐗╂潗鏂欏叿鏈夊崄鍒嗙悊鎯崇殑鍏夊(xu茅)甯堕殭浠ュ強杓冮珮鐨勫惛鏀舵晥鐜�锛屾姉杓荤収鑳藉姏寮�(qi谩ng)锛屽皪(du矛)鐔变笉鏁忔劅锛岄仼鍚堜簬鍒堕€犻珮鏁堝柈绲�(ji茅)闆绘睜銆備絾鏄疓aAs鏉愭枡鐨勫児(ji脿)鏍间笉鑿诧紝鍥犺€屽湪寰堝ぇ绋嬪害涓婇檺鍒朵簡鐢℅aAs闆绘睜鐨勬櫘鍙�銆�

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閵呴姦纭扖uInSe2绨�(ji菐n)绋盋IC.CIS鏉愭枡鐨勮兘闄嶇偤1.leV锛岄仼浜庡お闄藉厜鐨勫厜闆昏綁(zhu菐n)鎻�锛屽彟澶�锛孋IS钖勮啘澶櫧闆绘睜涓嶅瓨鍦ㄥ厜鑷磋“閫€鍟忛銆傚洜姝�锛孋IS鐢ㄤ綔楂樿綁(zhu菐n)鎻涙晥鐜囪杽鑶滃お闄借兘闆绘睜鏉愭枡涔熷紩璧蜂簡浜哄€戠殑娉ㄧ洰銆�

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纰插寲閹樺お闄借兘闆绘睜

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