SemiCon China 2023 浼澅灞曚綅銆怑3,3369銆�
浼澅浼佹キ(y猫)锛堜笂娴凤級鏈夐檺鍏徃浣滅偤寰峰湅 Pfeiffer 鐪熺┖瑷�(sh猫)鍌�, 缇庡湅 inTEST 楂樹綆婧矕鎿婄啽娴佸剙, 缇庡湅 KRi 闆㈠瓙婧�, 缇庡湅 HVA 楂樼湡绌洪枠闁�, 绛夊湅闅涢€插彛鐪熺┖鍝佺墝鐨勪唬鐞嗗晢, 鍙冨睍 SemiCon China 2023 涓婃捣鍗婂皫(d菐o)楂斿睍锛�
涓婃捣浼澅鎲戝€熷骞寸湡绌虹稉(j墨ng)椹�, 鍦ㄦ彁渚涘悎閬╃殑鐢�(ch菐n)鍝佸悓鏅傛洿鐐烘偍鎻愪緵鍚勯鐪熺┖宸ヨ棟鐨勮В姹烘柟妗�, 鍗�(xi茅)鍔╂偍鍎�(y艒u)鍖栧伐钘濋亷绋�, 鎻愰珮鐢熺敘(ch菐n)鏁堢巼! 涓婃捣浼澅鏈熷緟鎮ㄧ殑钂炶嚚锛�
銆愬弮灞曟檪闁撱€�: 2023骞�6鏈�29-7鏈�1鏃�
銆愬湴榛炪€�: 涓婃捣鏂板湅闅涘崥瑕戒腑蹇�
銆愪集鏉卞睍浣嶃€�: E3铏熼え, 3369 浣嶇疆


鍦ㄧ従(xi脿n)鍫�, 鎴戝€�?y艒u)妲燁專鏂€鑶簃鐢ㄤ簬鍗婂皫(d菐o)楂旇妤�(y猫)鐨勫悇椤炵敘(ch菐n)鍝�锛�
寰峰湅 Pfeiffer 姘﹁唱(zh矛)璀滄婕忓剙 ASM 390
灏堢偤鍗婂皫(d菐o)楂�, 閸嶈啘琛屾キ(y猫)鐮旂櫦(f膩)
绗﹀悎 Semi S2 妯欐簴
澶ф娊閫�, 骞插紡, 鏂逛究绉诲嫊

寰峰湅 Pfeiffer 澶ф娊閫熸甫杓垎瀛�娉� HiPace 1200-2800 IT
楂樻娊閫�, 楂樻埃楂斿悶鍚愰噺
灏嶅伐钘濇矇绌嶇殑鎶垫姉鍔涘挤
鎻愪緵鑰愯厫铦曞瀷铏�

缇庡湅 KRi 澶у彛寰戝皠闋婚洟瀛愭簮
3灞�?x霉n)鑹燨瑷�(sh猫)瑷�, 鏌垫サ鍙e緫 38cm
鎻愪緵闆㈠瓙鍕曡兘 100-1200eV 瀵潫闆㈠瓙鏉�, 闆㈠瓙鏉熸祦 > 1000mA
婊胯冻 300 mm (12鑻卞)鏅跺湏鍒昏潟
閬╃敤浜庨洟瀛愬埢铦�, 婵哄皠娌夌⿳

缇庡湅 inTEST 楂樹綆婧矕鎿婄啽娴佸剙 ATS-710E
婧害鑼冨湇 掳C: -75鑷�+225 50Hz
闃查潨闆昏ō(sh猫)瑷�, 鑷嫊闄ら湝
鏀寔 Ethernet, IEEE-488, RS232
缇庡湅 Thermonics Process Chillers 瓒呬綆婧啺姘存
鎻愪緵 -80掳C 浣庢韩鍐版按姗熷拰 -120掳C 瓒呬綆婧啺姘存
鐢ㄤ簬鍐峰嵒宸ヨ棟閬庣▼涓殑姘i珨鍜屾恫楂�
閬╃敤浜庡崐灏�(d菐o)楂斿墠绔拰鍚庣鍚勯宸ヨ棟鍐峰嵒
缇庡湅 HVA 瓒呴珮鐪熺┖闁橀枼 11000 绯诲垪
鍙e緫: DN 16 - 800 mm
妤甸檺澹撳姏: 楂樼湡绌� 1x10-9 mbar; 瓒呴珮鐪熺┖ 1x10-10 mbar
6瀵�, 8瀵� 鐪熺┖鎻掓澘闁ュ唬娉涙噳(y墨ng)鐢ㄤ簬鍗婂皫(d菐o)楂旀埃楂旂璺腑!

缇庡湅 Gel-Pak 鑺墖鍖呰鐩�
閬╃敤浜庡劜瀛樺拰閬嬭几鍗婂皫(d菐o)楂旂簿瀵嗗櫒浠�, 鍏夐浕鍣ㄤ欢鍜屽叾浠栫簿瀵嗗櫒浠剁瓑
鑻ユ偍闇€瑕侀€蹭竴姝ョ殑浜嗚В鏇村淇℃伅, 璜嬪弮鑰冧互涓嬭伅(li谩n)绲�(lu貌)鏂瑰紡
涓婃捣浼澅: 缇呭厛鐢�
鍏嶈铂鑱叉槑锛� 鏈枃鍍呬唬琛ㄤ綔鑰呭€嬩汉瑙€榛�锛岃垏 缍犺壊绡€(ji茅)鑳界挵(hu谩n)淇濈恫(w菐ng) 鐒¢棞(gu膩n)銆傚叾鍘熷壍(chu脿ng)鎬т互鍙婃枃涓櫝杩版枃瀛楀拰鍏�(n猫i)瀹规湭缍�(j墨ng)鏈珯璀夊锛� 灏嶆湰鏂囦互鍙婂叾涓叏閮ㄦ垨鑰呴儴鍒嗗収(n猫i)瀹�銆佹枃瀛楃殑鐪熷鎬�銆佸畬鏁存€с€佸強鏅傛€ф湰绔欎笉浣滀换浣曚繚璀夋垨鎵胯锛岃珛璁€鑰呭儏 浣滃弮鑰�锛屽苟璜嬭嚜琛屾牳瀵︾浉闂�(gu膩n)鍏�(n猫i)瀹�銆�